The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2005
Filed:
Oct. 11, 2002
Takeshi Ootsuka, Funabashi, JP;
Kazunori Endou, Funabashi, JP;
Mamoru Kosakai, Narashino, JP;
Abstract
There is provided a susceptor with a built-in electrode and a manufacturing method therefor, in which there is no danger of corrosive gas or plasma or the like penetrating to the inside of the substrate, which has excellent corrosion resistance and plasma resistance, in which nonconductivity under high temperatures is improved, and in which leakage current does not occur. A susceptor with a built-in electrodeaccording to the present invention comprises: a mounting plateand a support platewhich are formed from aluminum nitride based sintered bodies; an internal electrodeformed from either an aluminum nitride and tungsten composite sintered body or an aluminum nitride and molybdenum composite sintered body, which is formed between the mounting plateand the support plate; and power supply terminalswhich are provided in the support plateand are electrically connected to the internal electrode, and both surfaces of the internal electrodeare coated with a nonconductive materialcomprising AlN particles.