The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2005
Filed:
Feb. 28, 2003
Applicants:
Shunsuke Tanaka, Otsu, JP;
Masami Shinohara, Yasu-gun, JP;
Kohichi Ishimoto, Rittou, JP;
Inventors:
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F001/00 ; H01L021/306 ;
U.S. Cl.
CPC ...
Abstract
A slurry collection deviceincludes a ring-shaped barrier memberprovided around a turntable T of a polishing machine E and a ring-shaped slurry collection containerprovided around the barrier memberThe turntable T is connected to an upper end of a main rotation shaft Tthat sticks out from a bottom portion of a sink S of the polishing machine E and is lifted from the bottom portion of the sink S. The slurry collection deviceof the present invention is inserted between the turntable T and the sink S.