The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
Oct. 11, 2002
Kuo-liang Huang, Hsiu-Chu, TW;
Enzo Kuo, Hsiu-Chu, TW;
Patrick Chen, Tainan, TW;
Yuan-chich Lin, Feng-San, TW;
Chih-yi Lai, Hsin-Chu, TW;
Chun-hung Liu, Hsin-Chu, TW;
Kuo-Liang Huang, Hsiu-Chu, TW;
Enzo Kuo, Hsiu-Chu, TW;
Patrick Chen, Tainan, TW;
Yuan-Chich Lin, Feng-San, TW;
Chih-Yi Lai, Hsin-Chu, TW;
Chun-Hung Liu, Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd, Hsin Chu, TW;
Abstract
The integrity of control signals used to control a wafer handling robot is monitored by a monitor connected to various points of the robotic control system. The monitor includes a memory for storing data sets representing correct, reference characteristics of the control signals. The monitor samples control signals at various points in the control system and compares these sampled signals with the stored reference characteristics in order to determine whether a signal disparity exists. If a disparity exists, the monitor generates an error.