The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
Aug. 30, 2002
Eric O. Green, Austin, TX (US);
Matthew A. Purdy, Austin, TX (US);
Elfido Coss, Jr., Austin, TX (US);
Christopher A. Bode, Austin, TX (US);
Robert J. Chong, Austin, TX (US);
Gregory A. Cherry, Austin, TX (US);
Eric O. Green, Austin, TX (US);
Matthew A. Purdy, Austin, TX (US);
Elfido Coss, Jr., Austin, TX (US);
Christopher A. Bode, Austin, TX (US);
Robert J. Chong, Austin, TX (US);
Gregory A. Cherry, Austin, TX (US);
Other;
Abstract
A method and an apparatus for adjusting a process controller based upon a fault detection analysis. A process step upon a workpiece is performed using a processing tool. Manufacturing data relating to processing of the workpiece is acquired. The manufacturing data may include metrology data relating to the processed workpiece and/or tool state data relating to the tool state of a processing tool. A metrology/tool state data integration process is performed based upon the acquired manufacturing data. The metrology/tool state data integration process includes performing an assessment of a tool health related to the processing tool and adjusting an emphasis of the metrology data based upon the assessment of the tool health.