The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
Mar. 15, 2001
Erik C. Houge, Orlando, FL (US);
Catherine Vartuli, Windermere, FL (US);
Mike Antonell, Orlando, FL (US);
Pam Cavanagh, Orlando, FL (US);
Hui MA, Gainesville, FL (US);
Erik C. Houge, Orlando, FL (US);
Catherine Vartuli, Windermere, FL (US);
Mike Antonell, Orlando, FL (US);
Pam Cavanagh, Orlando, FL (US);
Hui Ma, Gainesville, FL (US);
Agere Systems Inc., Allentown, PA (US);
Abstract
The present invention provides a method for detecting defects in a material and a system for accomplishing the same. The method includes obtaining an image of at least a portion of a material's surface and converting the image into an intensity profile. The method further includes determining a defect in the material's surface from the intensity profile. In one exemplary embodiment, the image is an electron image obtained using a scanning electron microscope. The method may further be used to determine a defect density in the material's surface.