The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
Jul. 02, 2003
Applicants:
You Hie Han, Daejeon, KR;
Chang Su Jun, Seoul, KR;
Yang Ghi Min, Kyungki-do, KR;
Inventors:
Assignee:
EO Technics Co., Ltd., Anyang, KR;
Primary Examiner:
Int. Cl.
CPC ...
B23K026/00 ; B23K026/14 ; B23K026/16 ; B23K026/18 ;
U.S. Cl.
CPC ...
Abstract
A chip scale marker includes a laser system performing laser marking, a wafer holder on which a wafer subject to the laser marking is mounted, the wafer holder comprising a vacuum plate disposed at a center of the wafer holder for sucking the wafer and a wafer rotating unit provided at a circumference of the vacuum plate and having an open area facing the laser system, a camera disposed above the wafer holder to photograph the wafer, and a warpage removing unit provided above the wafer holder for removing warpage from the wafer.