The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
Oct. 18, 2002
Dmitry Lubomirsky, Cupertino, CA (US);
Michael X. Yang, Pala Alto, CA (US);
Girish A. Dixit, San Jose, CA (US);
Vincent E. Burkhart, San Jose, CA (US);
Allen L. D'ambra, Burlingame, CA (US);
Yeuk-fai Edwin Mok, San Francisco, CA (US);
Harald Herchen, Los Altos, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Michael X. Yang, Pala Alto, CA (US);
Girish A. Dixit, San Jose, CA (US);
Vincent E. Burkhart, San Jose, CA (US);
Allen L. D'Ambra, Burlingame, CA (US);
Yeuk-Fai Edwin Mok, San Francisco, CA (US);
Harald Herchen, Los Altos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method for cleaning the electrical contact areas or substrate contact areas of an electrochemical plating contact ring is provided. Embodiments of the method include positioning a substrate on a substrate support member having one or more electrical contacts, chemically plating a metal layer on at least a portion of a surface of the substrate, removing the processed substrate from the support member, and cleaning the one or more electrical contacts with a vapor mixture comprising an alcohol. In another aspect, the method includes spraying the vapor mixture on the electrical contacts while rotating the substrate support member.