The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
May. 16, 2003
Ali Shajii, Canton, MA (US);
Nicholas Eugene Kottenstette, South Bend, IN (US);
R. Leonard Myatt, Norfolk, MA (US);
Jeffrey Vincent Anastas, Kennebunk, ME (US);
Ali Shajii, Canton, MA (US);
Nicholas Eugene Kottenstette, South Bend, IN (US);
R. Leonard Myatt, Norfolk, MA (US);
Jeffrey Vincent Anastas, Kennebunk, ME (US);
MKS Instruments, Inc., Wilmington, MA (US);
Abstract
A mass flow measurement apparatus including a flow path defined by a tubular side wall, a probe extending through the side wall into the flow path so that a first portion of the probe is located in the flow path and a second portion of the probe, extends out of the side wall, a heater element secured to the probe, and a seal preventing fluid flowing through the flow path from contacting the heater element.