The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2005
Filed:
Mar. 04, 2002
Applicant:
Matthew S. Ryskoski, Kyle, TX (US);
Inventor:
Matthew S. Ryskoski, Kyle, TX (US);
Assignee:
Advanced Micro Devices, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N037/00 ; G06F019/00 ; H01L021/00 ;
U.S. Cl.
CPC ...
Abstract
A method includes processing a workpiece in a process flow. Workpiece state trace data is collected for the workpiece during its processing in the process flow. A quality profile of the workpiece is generated based on the workpiece state trace data. A manufacturing system includes a plurality of tools configured to process a workpiece in a process flow and a quality monitor. The quality monitor is configured to collect workpiece slate trace data for the workpiece during its processing in the process flow generate a quality profile of the workpiece based on the workpiece state trace data.