The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2005
Filed:
May. 06, 2002
Applicants:
Jorg Kiesewetter, Dresden, DE;
Michael Teich, Friedewald, DE;
Stefan Schneidewind, Reichenberg, DE;
Claus Dietrich, Sacke, DE;
Inventors:
Jorg Kiesewetter, Dresden, DE;
Michael Teich, Friedewald, DE;
Stefan Schneidewind, Reichenberg, DE;
Claus Dietrich, Sacke, DE;
Assignee:
SUSS MicroTec Testsystems (GmbH), Sacka bei Dresden, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R031/02 ;
U.S. Cl.
CPC ...
Abstract
A substrate-holding device is designed as a one-piece ceramic element having a number of variably heavily doped layer regions. At least one layer region is a conductive region and at least one layer region is an insulative region. A multilayer chuck structure is thereby formed which does not exhibit mechanical surface interfaces between the layers.