The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2005
Filed:
Aug. 29, 2002
Applicants:
Scott Jeffrey Deboer, Boise, ID (US);
Husam N. Al-shareef, Boise, ID (US);
Randhir P. S. Thakur, Cupertino, CA (US);
Dan Gealy, Kuna, ID (US);
Inventors:
Scott Jeffrey DeBoer, Boise, ID (US);
Husam N. Al-Shareef, Boise, ID (US);
Randhir P. S. Thakur, Cupertino, CA (US);
Dan Gealy, Kuna, ID (US);
Assignee:
Micron Technology, Inc., Boise, ID (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L027/108 ;
U.S. Cl.
CPC ...
Abstract
A capacitor has a tantalum oxynitride film. One method for making the film comprises forming a bottom plate electrode and then forming a tantalum oxide film on the bottom plate electrode. Nitrogen is introduced to form a tantalum oxynitride film. A top plate electrode is formed on the tantalum oxynitride film.