The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2005
Filed:
Mar. 08, 2002
Applicants:
Cole Porter, Tracy, CA (US);
Alan L. Starner, Orange, CA (US);
Inventors:
Cole Porter, Tracy, CA (US);
Alan L. Starner, Orange, CA (US);
Assignee:
Aviza Technology, Inc., Scotts Valley, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B001/02 ;
U.S. Cl.
CPC ...
Abstract
A system and method of minimizing stress related to the ramp rate of a variable by limiting the ramp rate as a function of the current value of the variable is provided. More specifically, the present invention provides a system and method of maintaining the radial delta temperature of a semiconductor substrate or other heated body below the crystal slip curve by dynamically controlling the temperature ramp rate during processing.