The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2005
Filed:
Oct. 20, 2003
Applicants:
Satyavolu S. Papa Rao, Garland, TX (US);
Stephan Grunow, Dallas, TX (US);
Noel M. Russell, Plano, TX (US);
Inventors:
Satyavolu S. Papa Rao, Garland, TX (US);
Stephan Grunow, Dallas, TX (US);
Noel M. Russell, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L021/00 ; G01K007/36 ;
U.S. Cl.
CPC ...
Abstract
A coil () is placed adjacent to a semiconductor wafer (). An AC excitation current is used to create a changing electromagnetic field () is the wafer (). The wafer is heated by a heat source () and the conductivity of the wafer () will change as a function of the wafer temperature. Induced eddy currents will cause the inductance of the coil () to change and the temperature of the wafer () can be determined by monitoring the inductance of the coil ().