The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2005
Filed:
Jan. 15, 2003
Takanobu Asano, Shiroyama-Machi, JP;
Katsutoshi Ishii, Shiroyama-Machi, JP;
Hiroyuki Yamamoto, Shiroyama-Machi, JP;
George Hoshi, Shiroyama-Machi, JP;
Kazutoshi Miura, Shiroyama-Machi, JP;
Takanobu Asano, Shiroyama-Machi, JP;
Katsutoshi Ishii, Shiroyama-Machi, JP;
Hiroyuki Yamamoto, Shiroyama-Machi, JP;
George Hoshi, Shiroyama-Machi, JP;
Kazutoshi Miura, Shiroyama-Machi, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
The present invention relates generally to a heat treatment system and method for heat-treating an object to be treated. Particularly, the invention relates to a heat treatment system wherein an object to be treated is carried in a reaction vessel, which has been pressure-reduced to a predetermined degree of vacuum and the interior of which is heated to a predetermined process temperature, and a process gas is supplied into the reaction vessel via a gas feed passage to process the object.