The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2005
Filed:
Mar. 26, 2003
Bao Nian Zhai, Singapore, SG;
Ka Shing Kenny Kwan, Singapore, SG;
Wen Chen, Singapore, SG;
Gang Ou, Singapore, SG;
You Yong Liao, Singapore, SG;
Bao Nian Zhai, Singapore, SG;
Ka Shing Kenny Kwan, Singapore, SG;
Wen Chen, Singapore, SG;
Gang Ou, Singapore, SG;
You Yong Liao, Singapore, SG;
ASM Technology Singapore Pte. Ltd., Singapore, SG;
Abstract
An apparatus and method are provided for attenuating vibration when driving an object. The apparatus includes a driving device for generating a driving force to drive the object and an attenuation actuator mounted in reciprocal relationship with the driving device for generating an attenuation force substantially concurrently with the generation of the driving force. The attenuation force is generated so as to oppose and at least partially cancel a reaction force exerted by the object in response to the driving force.