The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2005
Filed:
Aug. 29, 2001
James Kent Heckman, Chandler, AZ (US);
Stephen Gregory Shermer, Chandler, AZ (US);
James Kent Heckman, Chandler, AZ (US);
Stephen Gregory Shermer, Chandler, AZ (US);
Amkor Technology, Inc., Chandler, AZ (US);
Abstract
A placement template and method for placing optical dies provides an alternative to large-die implementation for microelectromechanical systems (MEMS). Multiple dies are aligned by a template mounted on the substrate. Apertures in the template receive the dies and protrusions at the edges of the apertures guide the dies during mounting. The protrusions may be tapered having a narrow end farthest from the substrate to provide self-alignment of the dies as they are placed. The template may be epitaxially grown from a semiconductor material on either the substrate or a backing layer. The template may also be etched, stamped or otherwise formed from a metal or ceramic layer. A separate template may be bonded to a ceramic or other substrate by an eutectoid bond, providing carefully controlled template placement on the substrate.