The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2005
Filed:
Jul. 09, 2002
Chih Hsin Wang, San Jose, CA (US);
Chih Hsin Wang, San Jose, CA (US);
Silicon Storage Technology, Inc., Sunnyvale, CA (US);
Abstract
A self aligned method of forming a semiconductor memory array of floating gate memory cells in a semiconductor substrate having a plurality of spaced apart isolation regions and active regions on the substrate substantially parallel to one another in the column direction, and an apparatus formed thereby. Floating gates are formed in each of the active regions. In the row direction, trenches are formed that are filled with a conducting material such as metal or metalized polysilicon to form blocks of the conducting material that constitute source lines. Each source line extends over and is electrically connected to one of the source regions in each of the active regions.