The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2005
Filed:
May. 28, 2002
Applicants:
Norio Hirashita, Higashi-yamato, JP;
Takashi Ichimori, Tokyo, JP;
Toshiyuki Nakamura, Tokyo, JP;
Inventors:
Assignee:
Oki Electric Industry Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L021/336 ;
U.S. Cl.
CPC ...
Abstract
A heat treatment for diffusing impurity ions implanted into a silicon layer is performed at a heat treatment temperature which is less than an aggregation temperature of the silicon layer. A thermal aggregation of the silicon layer can be inhibited, thereby reducing a silicon deficiency of the silicon layer.