The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2005
Filed:
Sep. 19, 2002
Applicant:
Robert K. Henderson, Austin, TX (US);
Inventor:
Robert K. Henderson, Austin, TX (US);
Assignee:
DuPont Photomasks, Inc., Round Rock, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F009/00 ;
U.S. Cl.
CPC ...
Abstract
A photomask and method for evaluating an initial calibration for a scanning electron microscope are disclosed. The method includes generating an initial calibration for a SEM that contains a target width for a feature on a reference target and measuring the feature on the reference target in the SEM to determine a measured width for the feature. The measured width is compared to the target width to generate a shift deviation and a current calibration for the SEM is adjusted based on the shift deviation.