The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2005
Filed:
Nov. 13, 2000
Kenji Sato, Moriyama, JP;
Hiromitu Wada, Kusatu, JP;
Fujio Murai, Yokaichi, JP;
Koichi Mimura, Otsu, JP;
Masanori Akita, Otsu, JP;
Kenji Sato, Moriyama, JP;
Hiromitu Wada, Kusatu, JP;
Fujio Murai, Yokaichi, JP;
Koichi Mimura, Otsu, JP;
Masanori Akita, Otsu, JP;
Toray Engineering Co., Ltd., Osaka, JP;
Abstract
In a probe apparatus comprising an inspecting device, an intermediate substrate and a probe substrate, in which the inspecting device is electrically connected to a proximal end of the intermediate substrate, and the intermediate substrate has a distal end electrically connected to a proximal end of the probe substrate, and the probe substrate has a distal end electrically connectable to a substrate under inspection, a plurality of probe substrates are electrically connected to the single intermediate substrate. When a particular probe substrateis damaged, only the particular probe substratemay be changed, the other probe substratescontinuing to be used, thereby achieving economy.