The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2005
Filed:
Nov. 18, 1996
Applicants:
Daniel L. Flamm, Walnut Creek, CA (US);
Georgy K. Vinogradov, Kanagawa, JP;
Shimao Yoneyama, Yamanashi, JP;
Inventors:
Daniel L. Flamm, Walnut Creek, CA (US);
Georgy K. Vinogradov, Kanagawa, JP;
Shimao Yoneyama, Yamanashi, JP;
Assignee:
Hitachi Kokusai Electric Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C016/00 ; C23F001/00 ;
U.S. Cl.
CPC ...
Abstract
A process for fabricating a product 28, 119. The process comprises the steps of subjecting a substrate to a composition of entities, at least one of the entities emanating from a species generated by a gaseous discharge excited by a high frequency field in which the vector sum of currents to phase and inverse-phase capacitive coupled voltages from the inductive coupling structure can be selectively maintained.