The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2005
Filed:
Jul. 22, 2002
Philip Bruce Henderson, Allentown, PA (US);
Mario Joseph Moniz, Emmaus, PA (US);
Andrew David Johnson, Doylestown, PA (US);
Eugene Joseph Karwacki, Jr., Orefield, PA (US);
Richard R. Bodette, Kingsport, TN (US);
Christopher Robert Cording, Kingsport, TN (US);
Herbert David Johnson, Kingsport, TN (US);
Philip Bruce Henderson, Allentown, PA (US);
Mario Joseph Moniz, Emmaus, PA (US);
Andrew David Johnson, Doylestown, PA (US);
Eugene Joseph Karwacki, Jr., Orefield, PA (US);
Richard R. Bodette, Kingsport, TN (US);
Christopher Robert Cording, Kingsport, TN (US);
Herbert David Johnson, Kingsport, TN (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
A process for cleaning a glass-coating reactor includes: (a) providing the reactor to be cleaned, wherein the reactor contains a glass substrate within a chamber and the chamber has an internal surface coated with at least one substance selected from the group consisting of SiNor SiO; (b) terminating a flow of a deposition gas to the reactor; (c) adding to the reactor at least one cleaning gas to react with the at least one substance to form at least one volatile product; and (d) removing from the reactor the at least one volatile product.