The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2005
Filed:
Jul. 11, 2003
Haim Feldman, Nof-Ayalon, IL;
Emanuel Elyasaf, Rehovot, IL;
Nissim Elmaliach, Raanana, IL;
Ron Naftali, Shoham, IL;
Boris Golberg, Ashdod, IL;
Silviu Reinhorn, Mevaseret-Zion, IL;
Haim Feldman, Nof-Ayalon, IL;
Emanuel Elyasaf, Rehovot, IL;
Nissim Elmaliach, Raanana, IL;
Ron Naftali, Shoham, IL;
Boris Golberg, Ashdod, IL;
Silviu Reinhorn, Mevaseret-Zion, IL;
Applied Materials INC, Santa Clara, CA (US);
Abstract
A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.