The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2005
Filed:
Aug. 16, 2000
Gilad Almogy, Givataim, IL;
Hadar Mazaki, Rehovot, IL;
Zvi Howard Phillip, Shoham, IL;
Silviu Reinhorn, Mevaseret-Zion, IL;
Boris Goldberg, Ashdod, IL;
Daniel I. Some, Rehovot, IL;
Gilad Almogy, Givataim, IL;
Hadar Mazaki, Rehovot, IL;
Zvi Howard Phillip, Shoham, IL;
Silviu Reinhorn, Mevaseret-Zion, IL;
Boris Goldberg, Ashdod, IL;
Daniel I. Some, Rehovot, IL;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A variable illumination angle inspection system is provided, including a light source providing a light beam and a scanner imparting scanning deflection to the light beam to provide a scanning beam approaching a substrate at a first angle. A deflection element is selectively insertable into an optical path of the scanning beam to deflect the scanning beam so as to cause the scanning beam to approach the substrate at a second angle.