The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2005
Filed:
Apr. 23, 2001
Bulent M. Basol, Manhattan Beach, CA (US);
Cyprian Uzoh, Milpitas, CA (US);
Halit N. Yakupoglu, Corona, CA (US);
Homayoun Talieh, San Jose, CA (US);
Bulent M. Basol, Manhattan Beach, CA (US);
Cyprian Uzoh, Milpitas, CA (US);
Halit N. Yakupoglu, Corona, CA (US);
Homayoun Talieh, San Jose, CA (US);
ASM Nutool, Inc., Milpitas, CA (US);
Abstract
A system for optionally depositing or etching a layer of a wafer includes mask plate opposed to the wafer with the mask plate having a plurality of openings that transport a solution to the wafer. An electrode assembly has a first electrode member and a second electrode member having channels that operatively interface a peripheral and center part of the wafer. The channels transport the solution to the mask.