The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2005
Filed:
Apr. 28, 2003
William Roberts, Mechanicsville, VA (US);
Marlene Strobl, Dresden, DE;
Paul Williams, Goldcliff Newport, GB;
Douglas J. Guerrero, Rolla, MO (US);
Alice F. Martin, Rolla, MO (US);
William Roberts, Mechanicsville, VA (US);
Marlene Strobl, Dresden, DE;
Paul Williams, Goldcliff Newport, GB;
Douglas J. Guerrero, Rolla, MO (US);
Alice F. Martin, Rolla, MO (US);
Infineon Technologies Richmond, LP, Sandston, VA (US);
Brewer Science Incorporated, Rolla, MO (US);
Abstract
A method for forming an anti-reflective coating on a semiconductor substrate, including providing a first vessel containing an anti-reflective coating component and a second vessel containing a solvent. The anti-reflective coating component from the first vessel and the solvent from the second vessel are supplied to a mixing chamber. The anti-reflective coating component and the solvent are mixed in the mixing chamber to form a product. The product is transferred to the semiconductor substrate. The product is applied to the semiconductor substrate to form the anti-reflective coating. A system for forming an anti-reflective coating on a semiconductor substrate, including a first vessel for containing an anti-reflective coating component and a second vessel for containing a solvent. The system also includes a mixing chamber for mixing the anti-reflective coating component with the solvent to form a product, and a fluid transport system connecting the mixing chamber and the substrate for supplying the product from the mixing chamber to the semiconductor substrate to form the anti-reflective coating.