The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2005
Filed:
Jun. 19, 2002
Wen-shan Chang, Fengshan, TW;
Jung-chang Chen, Hsinchu, TW;
Shih-chang Hsu, Hsinchu, TW;
Li-chung Wang, Taipei, TW;
Cheng-chia Kuo, Hsinchu, TW;
Jong-min Lin, Hsinchu, TW;
Kuo-ming Yu, Changhua, TW;
Da-hsiang Chou, Hsinchu, TW;
Kuo-chuan Chen, Changhua, TW;
Ming-te Chen, Hsinchu, TW;
Wen-Shan Chang, Fengshan, TW;
Jung-Chang Chen, Hsinchu, TW;
Shih-Chang Hsu, Hsinchu, TW;
Li-Chung Wang, Taipei, TW;
Cheng-Chia Kuo, Hsinchu, TW;
Jong-Min Lin, Hsinchu, TW;
Kuo-Ming Yu, Changhua, TW;
Da-Hsiang Chou, Hsinchu, TW;
Kuo-Chuan Chen, Changhua, TW;
Ming-Te Chen, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd, Hsin Chu, TW;
Abstract
A clamp for quickly, effectively and safely removing a cathode collar from an HDP deposition chamber for routine maintenance, cleaning or replacement of the collar. The clamp includes a pair of clamp plates which are capable of pivoting movement on respective ends of a connecting rod. A clamp shoe for gripping a corresponding edge of the annular collar is provided on the bottom end of each clamp plate, and a turnbuckle is fitted with a pair of threaded shafts which engage the upper end portions of the respective clamp plates. By rotating the turnbuckle, the threaded shafts are advanced away from each other against the clamp plates, which pivot on the connecting rod and cause the clamp shoes to tightly engage respective edges of the collar. The clamp is grasped to lift the collar from the chamber and replace the collar in the chamber after cleaning or maintenance.