The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2005
Filed:
Jul. 03, 2002
Craig A. West, Austin, TX (US);
Gregory P. Hughes, Austin, TX (US);
Kent B. Ibsen, Austin, TX (US);
DuPont Photomasks, Inc., Round Rock, TX (US);
Abstract
A method and apparatus for calibrating a metrology tool are disclosed. The method includes measuring a parameter of a contrast enhanced feature on an artifact using a metrology tool, where the contrast enhanced feature reduces random errors in the metrology tool during the measuring process. The measured parameter is compared with an initial parameter associated with the artifact and the metrology tool is adjusted until the measured parameter matches the initial parameter.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile