The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2005
Filed:
Mar. 14, 2003
Takashi Takekuma, Kikuchi-gun, JP;
Toshinobu Furusho, Kikuchi-gun, JP;
Takeshi Ohto, Kikuchi-gun, JP;
Hiroyuki Miyamoto, Kikuchi-gun, JP;
Kousuke Yoshihara, Kikuchi-gun, JP;
Shinya Hori, Kikuchi-gun, JP;
Hiroyuki Hara, Kikuchi-gun, JP;
Takashi Takekuma, Kikuchi-gun, JP;
Toshinobu Furusho, Kikuchi-gun, JP;
Takeshi Ohto, Kikuchi-gun, JP;
Hiroyuki Miyamoto, Kikuchi-gun, JP;
Kousuke Yoshihara, Kikuchi-gun, JP;
Shinya Hori, Kikuchi-gun, JP;
Hiroyuki Hara, Kikuchi-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A process liquid supply mechanism for supplying a process liquid comprises a process liquid supply source for supplying a process liquid, a process liquid discharging nozzle for discharging the process liquid, a pipe connecting the process liquid supply source to the process liquid discharging nozzle, a pump mounted to the pipe for allowing the process liquid to be discharged from the process liquid discharging nozzle, a pressure sensor for detecting the pressure of the process liquid at a prescribed position intermediate between the pump and the process liquid discharging nozzle, and a controller for controlling the inner pressure of the pump based on the pressure value detected by the pressure sensor and the relationship obtained in advance between the pressure and the discharging rate of the process liquid such that the process liquid is discharged at a prescribed discharging rate.