The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2005
Filed:
May. 30, 2002
Madhumita Sengupta, Sunnyvale, CA (US);
Mamta Sinha, Palo Alto, CA (US);
Theodore R. Lundquist, Dublin, CA (US);
William Thompson, Los Altos, CA (US);
Madhumita Sengupta, Sunnyvale, CA (US);
Mamta Sinha, Palo Alto, CA (US);
Theodore R. Lundquist, Dublin, CA (US);
William Thompson, Los Altos, CA (US);
Credence Systems Corporation, Milpitas, CA (US);
Abstract
A plurality of images, including a first image and a second image having a higher resolution than the first image, are aligned by generating an oversampled cross correlation image that corresponds to relative displacements of the first and second images, and, based on the oversampled cross correlation image, determining an offset value that corresponds to a misalignment of the first and second images. The first and second images are aligned to a precision greater than the resolution of the first image, based on the determined offset value. Enhanced results are achieved by performing another iteration of generating an oversampled cross correlation image and determining an offset value for the first and second images. Generating the oversampled cross correlation image may involve generating a cross correlation image that corresponds to relative displacements of the first and second images, and oversampling the cross correlation image to generate the oversampled cross correlation image.