The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2005
Filed:
Sep. 20, 2002
Applicants:
Daxing Ren, Pleasanton, CA (US);
Jerome S. Hubacek, Fremont, CA (US);
Nicholas E. Webb, Milpitas, CA (US);
Inventors:
Daxing Ren, Pleasanton, CA (US);
Jerome S. Hubacek, Fremont, CA (US);
Nicholas E. Webb, Milpitas, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 2146 ; H01L 2178 ; H01L 21301 ;
U.S. Cl.
CPC ...
Abstract
Silicon parts of a semiconductor processing apparatus containing low levels of metal impurities that are highly mobile in silicon are provided. The silicon parts include, for example, rings, electrodes and electrode assemblies. The silicon parts can reduce metal contamination of wafers processed in plasma atmospheres.