The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2005
Filed:
Mar. 05, 2002
Tomoki Nagai, Mie, JP;
Jun Numata, Mie, JP;
Shirou Kusumoto, Austin, TX (US);
Eiichi Kobayashi, Mie, JP;
Tomoki Nagai, Mie, JP;
Jun Numata, Mie, JP;
Shirou Kusumoto, Austin, TX (US);
Eiichi Kobayashi, Mie, JP;
JSR Corporation, Tokyo, JP;
Abstract
A carbazole derivative of the following formula (1),wherein Rand Rindividually represent a hydrogen atom or a monovalent organic group, or Rand Rform, together with the carbon atom to which Rand Rbond, a divalent organic group having a 3-8 member carbocyclic structure or a 3-8 member heterocyclic structure, and Rrepresents a hydrogen atom or a monovalent organic group. The carbazole derivative is suitable as an additive for increasing sensitivity of a chemically amplified resist. A chemically amplified radiation-sensitive resin composition, useful as a chemically amplified resist, comprising the carbazole derivative is also disclosed.