The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2005
Filed:
Feb. 28, 2002
Shuzo Sato, Kanagawa, JP;
Zenya Yasuda, Kanagawa, JP;
Masao Ishihara, Tokyo, JP;
Hiizu Ootorii, Kanagawa, JP;
Takeshi Nogami, Kanagawa, JP;
Naoki Komai, Kanagawa, JP;
Shuzo Sato, Kanagawa, JP;
Zenya Yasuda, Kanagawa, JP;
Masao Ishihara, Tokyo, JP;
Hiizu Ootorii, Kanagawa, JP;
Takeshi Nogami, Kanagawa, JP;
Naoki Komai, Kanagawa, JP;
Sony Corporation, Tokyo, JP;
Abstract
The electro-chemical machining apparatus of this invention is designed to smoothing a metal film by efficiently reducing initial rough surface and removing excessive metal film with reduced damages to the metal film. For this end, the electro-chemical machining apparatus performs electro-chemical machining of an object to be machined having a metal film on the surface to be machined. Such apparatus has a means for holding the object to be machined, a wiper for wiping the surface of the object to be machined, a means for supplying electrolytic solution onto the surface of the object to be machined, a first electrode disposed at a position opposed to the surface of the object to be machined, a second electrode disposed at a peripheral portion on the surface of the object to be machined, and a power supply for causing electrical current to flow between the second electrode on the surface of the object to be machined and the first electrode.