The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2005
Filed:
Jul. 07, 2003
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus
Theodorus H. J. Bisschops, Eindhoven, NL;
Jakob Vijfvinkel, Eindhoven, NL;
Hermanus M. J. R. Soemers, Mierlo, NL;
Johannes C. Driessen, Eindhoven, NL;
Michael J. M. Renkens, Geleen, NL;
Adrianus G. Bouwer, Nuenen, NL;
Theodorus H. J. Bisschops, Eindhoven, NL;
Jakob Vijfvinkel, Eindhoven, NL;
Hermanus M. J. R. Soemers, Mierlo, NL;
Johannes C. Driessen, Eindhoven, NL;
Michael J. M. Renkens, Geleen, NL;
Adrianus G. Bouwer, Nuenen, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing