The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2005
Filed:
Sep. 22, 2003
Robert W. Berner, Eagle, ID (US);
Joseph J. Fatula, Jr., San Jose, CA (US);
Robert Hitzfeld, San Jose, CA (US);
Richard Contreras, San Jose, CA (US);
Andrew Chiu, Milpitas, CA (US);
Robert W. Berner, Eagle, ID (US);
Joseph J. Fatula, Jr., San Jose, CA (US);
Robert Hitzfeld, San Jose, CA (US);
Richard Contreras, San Jose, CA (US);
Andrew Chiu, Milpitas, CA (US);
Semitool, Inc., Kalispell, MT (US);
Abstract
A cathode current control system employing a current thief for use in electroplating a wafer is set forth. The current thief comprises a plurality of conductive segments disposed to substantially surround a peripheral region of the wafer. A first plurality of resistance devices are used, each associated with a respective one of the plurality of conductive segments. The resistance devices are used to regulate current through the respective conductive finger during electroplating of the wafer. Various constructions are used for the current thief and further conductive elements, such as fingers, may also be employed in the system. As with the conductive segments, current through the fingers may also be individually controlled. In accordance with one embodiment of the overall system, selection of the resistance of each respective resistance devices is automatically controlled in accordance with predetermined programming.