The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2005
Filed:
Jul. 27, 1998
Paul S. Thompson, Santee, CA (US);
Paul S. Thompson, Santee, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
Heat is removed from an equipment enclosure using a recirculating air flow loop that is confined entirely within the enclosure. A segment of the air flow loop is directed onto heat-generating components, contained within housings mounted inside the enclosure. A segment of the air flow loop carries heated air to a heat exchanger, which transfers heat to flowing liquid. A portion of the air flow loop traverses through the ductless air volume confined between the housings and inner walls of the enclosure. Blowers to drive the air flow are typically mounted within or on a housing. Heat exchangers are also typically mounted on a housing. Embodiments of the present invention enable a single heat exchanger or multiple heat exchangers to cool multiple electronic components without complicated ducting and without exhausting heated air into a controlled manufacturing environment, e.g. a clean room.