The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2005
Filed:
Nov. 07, 2001
Wolfgang Otto, Aalen-Waldhausen, DE;
Wolfgang Otto, Aalen-Waldhausen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
The method is used for the interferometric measurement, in particular for the interferometric absolute measurement, of non-rotationally symmetric wavefront errors on a specimen. The specimen can in this case be brought into a plurality of rotational positions, at least one measurement result being determined in each of the rotational positions. A mathematical evaluation of all measurement results is carried out in conclusion. The measurement is carried out in at least two measurement series (M, N). The measurement results (M. . . M, N. . . N) of each of the measurement series (M, N) are respectively determined in mutually equidistant rotational positions of the specimen. Each of the measurement series (M, N) comprises a specific number m, n of measurements. The individual numbers m, n are natural and mutually coprime numbers.