The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2005
Filed:
Feb. 24, 2003
Applicants:
Gayle Buhrer, Meridian, ID (US);
Zane L. Drussel, Boise, ID (US);
Inventors:
Gayle Buhrer, Meridian, ID (US);
Zane L. Drussel, Boise, ID (US);
Assignee:
Micron Technology, Inc., Boise, ID (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3126 ;
U.S. Cl.
CPC ...
Abstract
Method for determining the location of a droplet of liquid placed on a surface of a semiconductor wafer. In one embodiment the method includes establishing first and second reference axes that intersect at a point and superimposing the point over the droplet on the semiconductor wafer surface. A first reference coordinate indicative of the position of the point along the first axis and a second reference coordinate indicative of the position of the point along the second axis are generated.