The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2005
Filed:
Oct. 12, 2000
H. Peter W. Hey, Sunnyvale, CA (US);
Yezdi N. Dordi, Palo Alto, CA (US);
Donald J. K. Olgado, Palo Alto, CA (US);
Mark Denome, San Jose, CA (US);
H. Peter W. Hey, Sunnyvale, CA (US);
Yezdi N. Dordi, Palo Alto, CA (US);
Donald J. K. Olgado, Palo Alto, CA (US);
Mark Denome, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method and associated apparatus for electro-chemically depositing a metal film on a substrate having a metal seed layer. The apparatus comprises a substrate holder that holds the substrate. The electrolyte cell receives the substrate in a processing position. The actuator is connected to the substrate holder and adjustably positions the substrate relative to the electrolyte cell. The method involves electro-chemically depositing a metal film on a substrate having a metal seed layer comprising disposing the substrate in an electrolyte cell that is configured to receive the substrate. The method comprises adjustably positioning the substrate relative to the electrolyte cell.