The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 04, 2005

Filed:

Jul. 31, 2002
Applicants:

Yuzo Shimobeppu, Kanagawa, JP;

Kazou Teshirogi, Kanagawa, JP;

Kazuhiro Yoshimoto, Kanagawa, JP;

Mitsuhisa Watanabe, Kanagawa, JP;

Yoshiaki Shinjo, Kanagawa, JP;

Takashi Mori, Tokyo, JP;

Koichi Yajima, Tokyo, JP;

Yusuke Kimura, Tokyo, JP;

Inventors:

Yuzo Shimobeppu, Kanagawa, JP;

Kazou Teshirogi, Kanagawa, JP;

Kazuhiro Yoshimoto, Kanagawa, JP;

Mitsuhisa Watanabe, Kanagawa, JP;

Yoshiaki Shinjo, Kanagawa, JP;

Takashi Mori, Tokyo, JP;

Koichi Yajima, Tokyo, JP;

Yusuke Kimura, Tokyo, JP;

Assignees:

Fujitsu Limited, Kanagawa, JP;

Disco Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 100 ;
U.S. Cl.
CPC ...
Abstract

A flat-object holder can hold a flat object-and-frame assembly, and the holder has the flat object fixed to the frame with protection tape. The flat-object holder includes at least a flat object supporting area for fixedly holding the flat object via the protection tape by applying a suction force, and a frame fixing area for fastening the frame. The flat-object holder bearing the flat object-and-frame assembly can be fixedly held by a selected chuck table by applying a negative pressure to the flat object supporting area. The flat-object holder can transfer and put the flat object-and-frame assembly in a container. Thus, no matter how thin the flat object may be, it can be handled without the fear of breaking.


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