The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2004
Filed:
Jul. 08, 2002
Applicant:
Inventors:
Henry A. Hill, Tucson, AZ (US);
Andrew Eric Carlson, Higganum, CT (US);
Peter J. De Groot, Middletown, CT (US);
Assignee:
Zygo Corporation, Middlefield, CT (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 ; G01B 1/100 ; G01B 9/21 ; G01C 1/972 ; F16M 1/00 ;
U.S. Cl.
CPC ...
G01B 9/02 ; G01B 1/100 ; G01B 9/21 ; G01C 1/972 ; F16M 1/00 ;
Abstract
A multi-axis interferometer includes a mounting block with first and second polarizing beam-splitter cubes contacting first and second faces of the mounting block. A beam-distribution system contacts a third face of the mounting block. The beam-distribution system is thus placed in optical communication with the first polarizing beam-splitter cube and the second polarizing beam-splitter cube.