The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2004
Filed:
Jun. 11, 2002
Diane W. Sidner, Noblesville, IN (US);
John R. Fruth, Kokorno, IN (US);
Dean M. Dahlgnist, Kokorno, IN (US);
Delphi Technologies, Inc., Troy, MI (US);
Abstract
An apparatus and method for measuring leakage current between a first semiconductor region and a second semiconductor region to be formed therein includes a system for measuring surface minority carrier leakage within the first semiconductor region. A correlation is established between surface minority carrier lifetime in the first semiconductor region and leakage current between the first and second semiconductor regions, and in one embodiment a surface minority carrier lifetime threshold is designated based on this correlation. Leakage current between the first and second regions is acceptable if the measured surface minority carrier lifetime is greater than this threshold. In an alternate embodiment, a leakage current threshold is established, and the measured surface minority carrier leakage is converted via the correlation to a measured leakage current. Leakage current between the first and second regions is acceptable in this embodiment if the measured leakage current is less than the leakage current threshold.