The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2004
Filed:
Oct. 15, 1998
Song C. Park, Plano, TX (US);
Takayuki Niuya, Plano, TX (US);
Boyang Lin, Richardson, TX (US);
Ming Hwang, Dallas, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
An embodiment of the instant invention is a method of oxidizing a first feature (feature and/or feature of FIG. and feature of FIG. ) while leaving a second feature substantially unoxidized (features and of FIG. and features and of FIG. ), the method comprised of subjecting the first and second features to an oxygen-containing gas and a separate hydrogen-containing gas. Preferably, the oxygen-containing gas is comprised of gas selected from the group consisting of O , N O, CO , H O, and any combination thereof, and the hydrogen-containing gas is comprised of H . The first feature is, preferably, comprised of polycrystalline silicon, silicon oxide, or a dielectric material, and the second feature is, preferably, comprised of tungsten.