The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2004
Filed:
Sep. 21, 2000
Applicant:
Inventors:
Michael N. Grimbergen, Redwood City, CA (US);
Xue-Yu Qian, San Jose, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01H 2/1306 ; C23C 1/600 ;
U.S. Cl.
CPC ...
H01H 2/1306 ; C23C 1/600 ;
Abstract
A process chamber capable of processing a substrate and monitoring a process conducted on the substrate , comprises a support , a gas inlet, a gas energizer, an exhaust , and a wall having a recess that is sized to reduce the deposition of process residues therein. A process monitoring system may be used to monitoring a process that may be conducted on a substrate in the process chamber through the recess in the wall