The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 07, 2004

Filed:

Aug. 21, 2000
Applicant:
Inventors:

Bryan K. Choo, Mountain View, CA (US);

Bhanwar Singh, Morgan Hill, CA (US);

Sanjay K. Yedur, San Jose, CA (US);

Assignee:

Advanced Micro Devices, Inc., Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06K 9/00 ; G01N 2/100 ;
U.S. Cl.
CPC ...
G06K 9/00 ; G01N 2/100 ;
Abstract

A system for evaluating optical proximity corrected (OPC) designs is provided. The system includes an analysis system for performing measurements relating to a segment of a feature. The analysis system is configured to determine a first image for the segment of the feature based upon the measurements. The analysis system determines a second image to facilitate analysis of the first image and evaluates OPC designs based upon comparisons of the first and second image.


Find Patent Forward Citations

Choo, Bryan. (2004). Optimization of opc design factors utilizing an advanced algorithm on a low voltage cd-sem system (U.S. Patent No. 6829380). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6829380

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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