The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2004
Filed:
Jul. 02, 2003
Applicant:
Inventors:
Masamichi Oi, Chiba, JP;
Tatsuya Asahata, Chiba, JP;
Assignee:
SII NanoTechnology Inc., Chiba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 1/312 ; H01J 3/700 ;
U.S. Cl.
CPC ...
G01N 1/312 ; H01J 3/700 ;
Abstract
A fine stencil structure correction device has a charged particle beam microscope lens-barrel which scans and corrects shapes of defect portions of a fine stencil structure sample using an etching or deposition function, and the fine stencil structure correction device further comprises transmitted beam detecting means for detecting a transmitted beam which is the charged particle beam penetrating the sample provided on a sample stage when the sample is scanned by the charged particle beam.