The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2004
Filed:
Jul. 09, 2003
Applicant:
Inventors:
Johannes Wilhelmus Maria Krikhaar, Veldhoven, NL;
Hubertus Jacobus Maria Van Beijsterveldt, Breda, NL;
Arthur Winfried Eduardus Minnaert, Veldhoven, NL;
Maurice Anton Jaques Teuwen, Heel, NL;
Joeri Lof, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 2/758 ; G03B 2/762 ;
U.S. Cl.
CPC ...
G03B 2/758 ; G03B 2/762 ;
Abstract
A substrate holder to adapt a small wafer to a wafer table of a lithographic apparatus adapted to receive a larger wafer includes a plate member with a burl pattern on which the small wafer is to be placed, positioning pins to locate the small wafer and a clamp formed by a clamp ring and magnets attached to the plate member.
Krikhaar, Johannes Wilhelmus Maria. (2004). Substrate holder and device manufacturing method (U.S. Patent No. 6822730). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6822730
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile