The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2004
Filed:
Feb. 10, 2003
Applicant:
Inventors:
Christine Hau-Riege, Fremont, CA (US);
John Sanchez, Palo Alto, CA (US);
Amit P. Marathe, Fremont, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/348 ;
U.S. Cl.
CPC ...
H01L 2/348 ;
Abstract
An interconnect test structure for characterizing electromigration includes a test line and a feeder coupled to the test line by a via structure. A width of the feeder line is greater than a width of the test line. Slots are formed in the feeder line for preventing formation of a stress-induced void at an interface between the feeder line and the via structure. Thus, an increase in resistance of the test structure is attributable to electromigration failure of the test line.