The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6821874 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 23, 2004

Filed:

Jan. 11, 2001
Applicant:
Inventors:

Masahiko Matsudo, Nirasaki, JP;

Kenji Suzuki, Nirasaki, JP;

Kazuya Okubo, Nirasaki, JP;

Assignee:

Tokyo Electron Limited, Tokyo-To, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/13205 ; H01L 2/14763 ;
U.S. Cl.
CPC ...
H01L 2/13205 ; H01L 2/14763 ;

Find Patent Forward Citations

Matsudo, Masahiko. (2004). Method for depositing tungsten silicide film and method for preparing gate electrode/wiring (U.S. Patent No. 6821874). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6821874

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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