The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2004
Filed:
May. 16, 2001
Isamu Namose, Suwa, JP;
Seiko Epson Corporation, , JP;
Abstract
A temperature adjustment apparatus that can reduce the amount of evaporation of a medium without using a closed type container. A temperature adjustment apparatus is composed of a container that contains PFC for heat exchange, a circulation path of the PFC that passes through an electrode of a plasma processing apparatus , and a pump . A liquid layer that separates from the PFC is formed in an upper layer of the PFC that is contained in the container . As a result, the PFC does not directly contact the atmosphere and therefore the amount of evaporation of the PFC into the atmosphere is substantially reduced.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile